Thermal Deformation of a Metal Mask for Pattern Formation of Sputtered Films

T. Yamazaki, T. Yoshizawa, T. Yamabuchi, S. Hirobayashi, T. Kikuta and N. Nakatani
JSST International Conference on Modeling, Control and Computation in Simulation, 372-376 (2000).
JSST International Conference on Modeling, Control and Computation in Simulation, Tokyo, Japan, 24-26 Oct.