Bottom-coverage simulation for magnetron sputtering apparatus activated with superconducting bulk magnet

Toshinari Yamazaki, Toshio Yoshizawa, Hirofumi Hazama, Shigeki Hirobayashi, Tatsuo Yamabuchi, Hiroshi Ikuta, Uichiro Mizutani, Takashi Matsuda
Vacuum, 80(7), 675-678 (2006).
Issue 7 SPEC. ISS., published at 31 May 2006

Leave a Reply

Your email address will not be published. Required fields are marked *