Step-coverage simulation for molybdenum silicide sputtering film

T. Yamazaki, N. Ikeda, Y. Nakashima, K. Sugimoto, A. Kitahara
Jpn. J. Appl. Phys., 32(12A), L1764-L1766 (1993).

Leave a Reply

Your email address will not be published. Required fields are marked *