Finite element analysis of thermal deformation of a metal mask for pattern formation of sputtered films

T. Yoshizawa, T. Yamazaki, T. Yamabuchi, S. Hirobayashi, T. Kikuta, N. Nakatani
J. Jpn. Soc. Simulation Technol. (in Japanese) "シミュレーション", 20(1), 71-77 (2001).
Mar. (in Japanese) "スパッタ膜のパターン形成用金属マスクの有限要素放熱変形解析"

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