Slit structure as a countermeasure for the thermal deformation of a metal mask

Toshinari Yamazaki, Toshio Yoshizawa, Tatsuo Yamabuchi, Shigeki Hirobayashi, Toshio Kikuta, Noriyuki Nakatani, Tahashi Mizuguchi
Jpn. J. Appl. Phys., 40(12), 7170-7173 (2001).
Dec.

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