Dependence of composition distribution of NiTi sputtered films on Ar gas pressure

T. Yoshizawa, T. Yamazaki, H. Takada, T. Kikuta, N. Nakatani, T. Yamabuchi and F.Takeda
The Sixth International Symposium on Sputtering & Plasma Processes (2001).
The Sixth International Symposium on Sputtering & Plasma Processes, kanazawa, Japan, 13-15 Jun.