Application of TiAl laminate to a sputtering target for TiAlN films Toshinari Yamazaki, Yoshio Okumura, Kenjiro Desaki, Toshio Kikuta, Hiroshi Anada, Noriyuki Nakatani 9th International Symposium on Sputtering & Plasma Processes, Kanazawa Kokusai Hotel, Kanazawa, Japan (2007).